Technology ❯ Semiconductors ❯ Chip Manufacturing

Lithography

EUV Technology Extreme Ultraviolet Lithography Multi-patterning Helium Atom Beam Innovation EUV Lithography Immersion Lithography ASML Extreme Ultraviolet (EUV) Lithography Free-Electron Lasers ASML Equipment

Microsoft-Backed Lace Raises $40 Million to Develop Helium-Atom Lithography

The effort targets chip features beyond photolithography’s limits using neutral helium atoms.

U.S. Signs Preliminary $150 Million Equity Offer With xLight for EUV Laser Source

Substrate Touts X-Ray Lithography Breakthrough After $100 Million Raise to Challenge ASML and TSMC

ASML Signals 2026 Sales Holding Up as EUV Orders Surge