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MIT Team Demonstrates Low-Cost GaN-on-Silicon Chips with Superior RF Performance

A low-temperature copper bonding process integrates GaN transistors onto CMOS chips to produce amplifiers with superior gain alongside higher bandwidth

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Overview

  • Researchers fabricate microscopic GaN dielets on a GaN wafer and use a specialized vacuum tool to bond them onto silicon CMOS substrates with nanometer precision.
  • The copper-to-copper bonding forms below 400 °C, cutting integration costs and preserving material integrity compared to traditional gold-based methods.
  • Prototype hybrid power amplifiers delivered stronger RF signals, broader bandwidth and cooler operation than equivalent all-silicon devices.
  • Distributing discrete GaN transistors across the silicon chip surface reduces hotspots and leverages existing semiconductor foundry procedures.
  • The hybrid chips promise advances in wireless communications and radar systems, smartphone call quality and battery life, and could support quantum computing at cryogenic temperatures.