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Intel and ASML Achieve 'First Light' Milestone in High-NA Lithography Development

This critical step forward in chip manufacturing technology promises to enhance resolution and efficiency in future chip designs.

  • Intel and ASML have successfully reached the 'First Light' milestone with their High-NA EUV lithography system, marking a significant advancement in chip manufacturing technology.
  • The 'First Light' achievement indicates that the light source and mirrors of the High-NA EUV system are operational, though not yet at peak performance.
  • The High-NA EUV lithography system can achieve resolutions down to 8nm with a single exposure, improving upon the 13.5nm resolution of traditional Low-NA EUV systems.
  • ASML's first High-NA EUV lithography machine is located in Veldhoven, Netherlands, with a second machine being assembled at an Intel facility near Hillsboro, Oregon.
  • Leading chipmakers, including Intel, Samsung, and TSMC, are expected to adopt High-NA EUV lithography within the next few years, with Intel planning to use it for its 14A generation of chips.
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